Multiprobe Atomic Force Microscope : The Next Evolution in Scanned Probe Microscopy

A multiprobe atomic force microscopy platform will be described that signifies an important next evolution in atomic force microscopy.  The platform permits nanoelectrical, anothermal, nano-optical characterization with multiple probes and also allows for multiprobe chemical nanolithography with unprecedented control. To attain such multiple parameter nanocharacterization a number of innovations both in instrument and probe design had to be achieved.  The advances include: 1.  Specialized scanners;  2.  An ultrasensitive feedback mechanism based on tuning forks with no optical feedback interference that can induce carriers in semiconductor devices or optical background in optical and spectroscopic applications; and 3.  Unique probes compatible with multiprobe geometries in which the probe tips can be brought into physical contact with one another.   A particularly important aspect of this development is the transparent integration of the platform with Raman spectroscopy and scanning electron and ion microscopes.  With the transparent integration of an atomic force microscope into Raman, on-line structural and chemical characterization is achieved even on the nanoscale.  With focused ion beam integration atomic force imaging synergistically interfaces with the nanoetching possibilities of an ion beam.  The developments offer a broad spectrum of important new directions in atomic force functional imaging.